Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction

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Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction

Optical emission spectroscopy has been employed as non-invasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titanium were used to observe the ionization ratio of e...

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Bibliographic Details
Published in:	Journal of Physics: Conference Series
Main Author:	Ren How S.; Nayan N.; Lias J.; Khairul Ahmad M.; Zainizan Sahdan M.; Hafiz Mamat M.; Rusop Mahmood M.; Aldalbahi A.
Format:	Conference paper
Language:	English
Published:	Institute of Physics Publishing 2018
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048370658&doi=10.1088%2f1742-6596%2f1027%2f1%2f012005&partnerID=40&md5=38ed4c47e8b3674255d89319b78bf90f

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