Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction
Optical emission spectroscopy has been employed as non-invasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titanium were used to observe the ionization ratio of e...
| Published in: | Journal of Physics: Conference Series |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Physics Publishing
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048370658&doi=10.1088%2f1742-6596%2f1027%2f1%2f012005&partnerID=40&md5=38ed4c47e8b3674255d89319b78bf90f |