ZnO-based transparent conductive thin films via sonicated-assisted sol-gel technique
We report on the growth of Al-doped ZnO (AZO) thin films onto Corning 7740 glass substrates via sonicated-assisted sol-gel technique. The influence of Al dopant on crystallisation behavior, optical and electrical properties of AZO films has been systematically investigated. All films are polycrystal...
| Published in: | AIP Conference Proceedings |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
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American Institute of Physics Inc.
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047373890&doi=10.1063%2f1.5036901&partnerID=40&md5=dbd9ad6fca607cd9ed05c4b85ce42655 |
| Summary: | We report on the growth of Al-doped ZnO (AZO) thin films onto Corning 7740 glass substrates via sonicated-assisted sol-gel technique. The influence of Al dopant on crystallisation behavior, optical and electrical properties of AZO films has been systematically investigated. All films are polycrystalline with a hexagonal wurtzite structure with a preferential orientation according to the direction <002>. All films exhibit a transmittance above than 80-90 % along the visible range up to 800 nm and a sharp absorption onset below 400 nm corresponding to the fundamental absorption edge of ZnO. © 2018 Author(s). |
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| ISSN: | 0094243X |
| DOI: | 10.1063/1.5036901 |