Humidity sensing properties of Al-doped zinc oxide coating films
Humidity sensor was fabricated using Al-doped zinc oxide (ZnO) coating films through spin-coating at room temperature. The sensing mechanism was discussed based on their nanostructures, such as surface area and porous nanostructures. Surface area and water adsorption are an important component in th...
Published in: | AIP Conference Proceedings |
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Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
American Institute of Physics Inc.
2018
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047337701&doi=10.1063%2f1.5036863&partnerID=40&md5=019b8d81fd062250866617a9bcf0f9de |