Humidity sensing properties of Al-doped zinc oxide coating films
Humidity sensor was fabricated using Al-doped zinc oxide (ZnO) coating films through spin-coating at room temperature. The sensing mechanism was discussed based on their nanostructures, such as surface area and porous nanostructures. Surface area and water adsorption are an important component in th...
Published in: | AIP Conference Proceedings |
---|---|
Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
American Institute of Physics Inc.
2018
|
Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047337701&doi=10.1063%2f1.5036863&partnerID=40&md5=019b8d81fd062250866617a9bcf0f9de |
id |
2-s2.0-85047337701 |
---|---|
spelling |
2-s2.0-85047337701 Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M. Humidity sensing properties of Al-doped zinc oxide coating films 2018 AIP Conference Proceedings 1963 10.1063/1.5036863 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047337701&doi=10.1063%2f1.5036863&partnerID=40&md5=019b8d81fd062250866617a9bcf0f9de Humidity sensor was fabricated using Al-doped zinc oxide (ZnO) coating films through spin-coating at room temperature. The sensing mechanism was discussed based on their nanostructures, such as surface area and porous nanostructures. Surface area and water adsorption are an important component in the low humidity, while at high humidity, porous nanostructures and capillary condensation become important. The results showed that the sensitivity of the Al-doped ZnO coating improved compared to that of the Al-doped ZnO nanorod arrays, with values of 7.38 at 40% to 90%RH (Relative humidity). All these results indicated that Al-doped ZnO coating had high potential for humidity-sensor applications. © 2018 Author(s). American Institute of Physics Inc. 0094243X English Conference paper |
author |
Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M. |
spellingShingle |
Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M. Humidity sensing properties of Al-doped zinc oxide coating films |
author_facet |
Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M. |
author_sort |
Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M. |
title |
Humidity sensing properties of Al-doped zinc oxide coating films |
title_short |
Humidity sensing properties of Al-doped zinc oxide coating films |
title_full |
Humidity sensing properties of Al-doped zinc oxide coating films |
title_fullStr |
Humidity sensing properties of Al-doped zinc oxide coating films |
title_full_unstemmed |
Humidity sensing properties of Al-doped zinc oxide coating films |
title_sort |
Humidity sensing properties of Al-doped zinc oxide coating films |
publishDate |
2018 |
container_title |
AIP Conference Proceedings |
container_volume |
1963 |
container_issue |
|
doi_str_mv |
10.1063/1.5036863 |
url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047337701&doi=10.1063%2f1.5036863&partnerID=40&md5=019b8d81fd062250866617a9bcf0f9de |
description |
Humidity sensor was fabricated using Al-doped zinc oxide (ZnO) coating films through spin-coating at room temperature. The sensing mechanism was discussed based on their nanostructures, such as surface area and porous nanostructures. Surface area and water adsorption are an important component in the low humidity, while at high humidity, porous nanostructures and capillary condensation become important. The results showed that the sensitivity of the Al-doped ZnO coating improved compared to that of the Al-doped ZnO nanorod arrays, with values of 7.38 at 40% to 90%RH (Relative humidity). All these results indicated that Al-doped ZnO coating had high potential for humidity-sensor applications. © 2018 Author(s). |
publisher |
American Institute of Physics Inc. |
issn |
0094243X |
language |
English |
format |
Conference paper |
accesstype |
|
record_format |
scopus |
collection |
Scopus |
_version_ |
1809677602857680896 |