Humidity sensing properties of Al-doped zinc oxide coating films

• Published in: AIP Conference Proceedings
• Main Author: Saidi S.A.; Mamat M.H.; Ismail A.S.; Malek M.F.; Yusoff M.M.; Sin N.D.M.; Zoolfakar A.S.; Khusaimi Z.; Rusop M.
• Format: Conference paper
• Language: English
• Published: American Institute of Physics Inc. 2018
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047337701&doi=10.1063%2f1.5036863&partnerID=40&md5=019b8d81fd062250866617a9bcf0f9de
• ISSN: 0094243X
• DOI: 10.1063/1.5036863

Humidity sensor was fabricated using Al-doped zinc oxide (ZnO) coating films through spin-coating at room temperature. The sensing mechanism was discussed based on their nanostructures, such as surface area and porous nanostructures. Surface area and water adsorption are an important component in the low humidity, while at high humidity, porous nanostructures and capillary condensation become important. The results showed that the sensitivity of the Al-doped ZnO coating improved compared to that of the Al-doped ZnO nanorod arrays, with values of 7.38 at 40% to 90%RH (Relative humidity). All these results indicated that Al-doped ZnO coating had high potential for humidity-sensor applications. © 2018 Author(s).