Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment
In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and b...
| Published in: | Proceedings of SPIE - The International Society for Optical Engineering |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
SPIE
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85033364633&doi=10.1117%2f12.2273717&partnerID=40&md5=ab7ee3acd50ffa0084e032dd61b6af90 |