B.Y, Z. S. H. A. M. F. M. (2017). Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. Proceedings of SPIE - The International Society for Optical Engineering, 10354, . https://doi.org/10.1117/12.2273717
Chicagoスタイル(17版)引用形式B.Y, Zawawi S.A.; Hamzah A.A.; Mohd-Yasin F.; Majlis. "Mechanical Performance of SiC Based MEMS Capacitive Microphone for Ultrasonic Detection in Harsh Environment." Proceedings of SPIE - The International Society for Optical Engineering 10354 (2017). https://doi.org/10.1117/12.2273717.
MLA(8版)引用形式B.Y, Zawawi S.A.; Hamzah A.A.; Mohd-Yasin F.; Majlis. "Mechanical Performance of SiC Based MEMS Capacitive Microphone for Ultrasonic Detection in Harsh Environment." Proceedings of SPIE - The International Society for Optical Engineering, vol. 10354, 2017, https://doi.org/10.1117/12.2273717.