Effect of oxygen flow rate on the ultraviolet sensing properties of zinc oxide nanocolumn arrays grown by radio frequency magnetron sputtering

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Effect of oxygen flow rate on the ultraviolet sensing properties of zinc oxide nanocolumn arrays grown by radio frequency magnetron sputtering

Highly transparent metal-semiconductor-metal ultraviolet (UV) photoconductive sensors were fabricated using thin (less than 100 nm in thickness), dense, small-diameter ZnO nanocolumn arrays prepared via low-power, catalyst-free radio frequency (RF) magnetron sputtering at different oxygen flow rates...

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Bibliographic Details
Published in:	Ceramics International
Main Author:	Mamat M.H.; Malek M.F.; Hafizah N.N.; Asiah M.N.; Suriani A.B.; Mohamed A.; Nafarizal N.; Ahmad M.K.; Rusop M.
Format:	Article
Language:	English
Published:	Elsevier Ltd 2016
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84973457890&doi=10.1016%2fj.ceramint.2015.11.083&partnerID=40&md5=1b048649c0a9938cd757f582b844d2da

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