pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films

Titanium dioxide (TiO2) thin films were fabricated on indium tin oxide (ITO) glass substrates using the spin coating technique and further were implemented as sensing membranes of the extended gate field effect transistor (EGFET) based pH sensor. The as-deposited thin films were annealed at differen...

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Bibliographic Details
Published in:Jurnal Teknologi
Main Author: Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
Format: Article
Language:English
Published: Penerbit UTM Press 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84970948404&doi=10.11113%2fjt.v78.8748&partnerID=40&md5=02f7cdd84b38eabb6973ab3186edba13

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