pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
Titanium dioxide (TiO2) thin films were fabricated on indium tin oxide (ITO) glass substrates using the spin coating technique and further were implemented as sensing membranes of the extended gate field effect transistor (EGFET) based pH sensor. The as-deposited thin films were annealed at differen...
| Published in: | Jurnal Teknologi |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84970948404&doi=10.11113%2fjt.v78.8748&partnerID=40&md5=02f7cdd84b38eabb6973ab3186edba13 |