pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films

Titanium dioxide (TiO2) thin films were fabricated on indium tin oxide (ITO) glass substrates using the spin coating technique and further were implemented as sensing membranes of the extended gate field effect transistor (EGFET) based pH sensor. The as-deposited thin films were annealed at differen...

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Published in:Jurnal Teknologi
Main Author: Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
Format: Article
Language:English
Published: Penerbit UTM Press 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84970948404&doi=10.11113%2fjt.v78.8748&partnerID=40&md5=02f7cdd84b38eabb6973ab3186edba13
id 2-s2.0-84970948404
spelling 2-s2.0-84970948404
Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
2016
Jurnal Teknologi
78
5-Aug
10.11113/jt.v78.8748
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84970948404&doi=10.11113%2fjt.v78.8748&partnerID=40&md5=02f7cdd84b38eabb6973ab3186edba13
Titanium dioxide (TiO2) thin films were fabricated on indium tin oxide (ITO) glass substrates using the spin coating technique and further were implemented as sensing membranes of the extended gate field effect transistor (EGFET) based pH sensor. The as-deposited thin films were annealed at different temperatures from 200 - 600 °C in room ambient for 20 min. The effects of different annealing temperatures on electrical and crystalline properties were analyzed by I-V two point probes measurement and X-ray diffraction respectively. Meanwhile, the surface morphology of thin films was observed by field emission scanning electron microscope (FESEM). We then measured the transfer characteristics (ID-VG) of the TiO2/ITO sensing membrane using a semiconductor parametric device analyzer for sensor characterization. It was found that, TiO2/ITO sensing membrane annealed at 300 °C achieved higher sensitivity and good linearity of 51.48 mV/pH and 0.99415, respectively in the pH buffer solutions of 4, 7, 10, and 12. Thin film annealed at 300 °C gives higher conductivity thin film of 384.62 S/m. We found that the conductivity of TiO2/ITO thin films was proportional with the sensitivity of sensing membrane. © 2016 Penerbit UTM Press. All rights reserved.
Penerbit UTM Press
1279696
English
Article
All Open Access; Bronze Open Access
author Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
spellingShingle Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
author_facet Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
author_sort Yusof K.A.; Rahman R.A.; Zulkefle M.A.H.; Herman S.H.; Abdullah W.F.H.
title pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
title_short pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
title_full pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
title_fullStr pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
title_full_unstemmed pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
title_sort pH sensitivity dependency on the annealing temperature of spin-coated titanium dioxide thin films
publishDate 2016
container_title Jurnal Teknologi
container_volume 78
container_issue 5-Aug
doi_str_mv 10.11113/jt.v78.8748
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84970948404&doi=10.11113%2fjt.v78.8748&partnerID=40&md5=02f7cdd84b38eabb6973ab3186edba13
description Titanium dioxide (TiO2) thin films were fabricated on indium tin oxide (ITO) glass substrates using the spin coating technique and further were implemented as sensing membranes of the extended gate field effect transistor (EGFET) based pH sensor. The as-deposited thin films were annealed at different temperatures from 200 - 600 °C in room ambient for 20 min. The effects of different annealing temperatures on electrical and crystalline properties were analyzed by I-V two point probes measurement and X-ray diffraction respectively. Meanwhile, the surface morphology of thin films was observed by field emission scanning electron microscope (FESEM). We then measured the transfer characteristics (ID-VG) of the TiO2/ITO sensing membrane using a semiconductor parametric device analyzer for sensor characterization. It was found that, TiO2/ITO sensing membrane annealed at 300 °C achieved higher sensitivity and good linearity of 51.48 mV/pH and 0.99415, respectively in the pH buffer solutions of 4, 7, 10, and 12. Thin film annealed at 300 °C gives higher conductivity thin film of 384.62 S/m. We found that the conductivity of TiO2/ITO thin films was proportional with the sensitivity of sensing membrane. © 2016 Penerbit UTM Press. All rights reserved.
publisher Penerbit UTM Press
issn 1279696
language English
format Article
accesstype All Open Access; Bronze Open Access
record_format scopus
collection Scopus
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