Enhancing the sensitivity properties of ZnO/SnO2 composite nanorods based humidity sensor via thermal chemical vapour deposition at various substrate temperature

• Published in: Advanced Science Letters
• Main Author: Md Sin N.D.; Shafura A.K.; Malek M.F.; Mamat M.H.; Rusop M.
• Format: Article
• Language: English
• Published: American Scientific Publishers 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84961262497&doi=10.1166%2fasl.2015.6548&partnerID=40&md5=82bee8dc0a1df7d82fe56fab29fd03c3
• ISSN: 19366612
• DOI: 10.1166/asl.2015.6548

The sensitivity properties of ZnO/SnO2 composite nanorods based humidity sensor via thermal chemical vapour deposition (CVD) at various substrate temperature was reported. The substrate temperature was varied from 200∼600 °C. The field emission scanning electron microscopy (FESEM) image reveals the size of ZnO/SnO2 composite nanorods thin film decreased with as the substrate temperature increased. The element contained of ZnO/SnO2 composite nanorods was investigated using energy-dispersive X-ray spectroscopy (EDS) and the crystallinity of ZnO/SnO2 composite nanorods thin film was determined using X-ray diffraction (XRD). The optical properties of ZnO/SnO2 composite nanorods was analysed by photoluminescence (PL). In addition, this sensor also shows the optimum thin film at deposition substrate temperature 500°C. The humidity sensor sensitivity of ZnO/SnO2 composite nanorods performed with ratio 265 times of 40 RH% to 90 RH%. The sensor of ZnO/SnO2 composite nanorods reveal 227 s response times and recovery 34 s times. © 2015 American Scientific Publishers All rights reserved.