Properties of boron doped amorphous carbon films by carbon palm oil for carbon based solar cell applications
The boron doped amorphous carbon were prepared by in-situ mixing of hydrocarbon palm oil and boron dopant and carrier gas, argon in the chamber by using bias assisted pyrolysis-CVD. The effect of substrate bias on the thickness, electrical and electronic properties of a-C:B film were investigated. T...
| Published in: | IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84908229988&doi=10.1109%2fSMELEC.2014.6920888&partnerID=40&md5=303e28cdd402a31201ad4c6f17c3bc93 |