Effect of substrate temperature on structural and morphological properties of indium tin oxide nanocolumns using RF magnetron sputtering

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Effect of substrate temperature on structural and morphological properties of indium tin oxide nanocolumns using RF magnetron sputtering

Indium tin oxide (ITO) nanocolumns were successfully deposited on both glass and silicon substrates at different substrate temperature from room temperature to 300°C by radio frequency (RF) magnetron sputtering system using an ITO target. The composition of the ITO target was 90% indium oxide and 10...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Najwa S.; Shuhaimi A.; Ameera N.; Hakim K.M.; Sobri M.; Mazwan M.; Musa M.Z.; Mamat M.H.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2014
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896888014&doi=10.4028%2fwww.scientific.net%2fAMR.895.12&partnerID=40&md5=706aae0de3e4822d95e837e210f0771f

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