Structural and optical properties of nickel (Ni)/indium tin oxide (ITO) thin-films deposited by RF magnetron sputtering

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Structural and optical properties of nickel (Ni)/indium tin oxide (ITO) thin-films deposited by RF magnetron sputtering

Nickel (Ni)/ indium tin oxide (ITO) thin-films have been deposited on silicon (Si) and glass substrates using radio-frequency (RF) magnetron sputtering at 200°C temperature. ITO layer was deposited on top of Ni layer with various deposition parameter. The material and optical properties of the ITO s...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Sobri M.; Shuhaimi A.; Mazwan M.; Hakim K.M.; Najwa S.; Ameera A.; Mamat M.H.; Musa M.Z.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2014
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896814990&doi=10.4028%2fwww.scientific.net%2fAMR.895.181&partnerID=40&md5=27d08d57ded0f54b3883c756b3bfa436

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