Structural and optical properties of nickel-doped zinc oxide thin film on nickel seed layer deposited by RF magnetron sputtering technique
Nickel (Ni)-doped zinc oxide (ZnO) layers were deposited simultaneously by radio frequency (RF) magnetron sputtering from a Ni and ZnO target. Ni seed layer was used as catalyst prior to the deposition of Ni-doped ZnO. This paper studies the influence of deposition temperature to the Ni seed layer a...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896804085&doi=10.4028%2fwww.scientific.net%2fAMR.895.3&partnerID=40&md5=b30b50cae9c3637db95788f3fc5a9765 |