Zn-doped SnO2 with 3D cubic structure for humidity sensor
Zinc doped tin oxide (Zn-doped SnO2) with three dimension (3D) cubic structure has been successfully grown on top of ZnO thin film. In this research, ZnO thin films prepared by rf magnetron sputtering and cubic structure of Zn-doped SnO2 developed by immersion method at low temperature are reported....
Published in: | Procedia Engineering |
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Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
Elsevier Ltd
2013
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891724772&doi=10.1016%2fj.proeng.2013.03.199&partnerID=40&md5=0bca13f37b9ba41dffbe59c5774a6afc |