Zn-doped SnO2 with 3D cubic structure for humidity sensor

• Published in: Procedia Engineering
• Main Author: Sin N.D.Md.; Samsudin N.; Ahmad S.; Mamat M.H.; Rusop M.
• Format: Conference paper
• Language: English
• Published: Elsevier Ltd 2013
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891724772&doi=10.1016%2fj.proeng.2013.03.199&partnerID=40&md5=0bca13f37b9ba41dffbe59c5774a6afc

Zinc doped tin oxide (Zn-doped SnO2) with three dimension (3D) cubic structure has been successfully grown on top of ZnO thin film. In this research, ZnO thin films prepared by rf magnetron sputtering and cubic structure of Zn-doped SnO2 developed by immersion method at low temperature are reported. The effects Zn doping concentration at (0 to 5 at.%) on the Zn-doped SnO2 were studied to form cubic structure. The performance of humidity sensor was tested using current-voltage (I-V) measurement (Keithley 2400) in a controlled chamber. The structural characterization was performed using field emission scanning electron microscopy (FESEM). The sensor performance at 5 % doping concentration was found to be highly sensitive and can be used as humidity sensor. The size of cubic structure decreases with the increase in doping concentration. © 2013 The Author.