Influence of substrate temperature on morphological and electrical properties of indium tin oxide nanocolumns prepared by RF magnetron sputtering
Indium tin oxide was prepared using RF magnetron sputtering at different substrate temperature. The morphological and electrical properties were investigated. Morphological properties were observed by atomic force microscopy. Electrical properties were measured using standard two-point probe measure...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891594914&doi=10.4028%2fwww.scientific.net%2fAMR.832.281&partnerID=40&md5=d9309cae3ea4431ae1d108a77652fe7b |