Characteristics of humidity sensor fabricated using nanostructured ZnO thin film by sol-gel method

• Published in: Advanced Materials Research
• Main Author: Mansor M.S.; Mamat M.H.; Mohamad Z.; Rusop M.
• Format: Conference paper
• Language: English
• Published: 2013
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875695571&doi=10.4028%2fwww.scientific.net%2fAMR.667.380&partnerID=40&md5=5143d209dd478bd05329ca2940b56802
• ISSN: 10226680
• DOI: 10.4028/www.scientific.net/AMR.667.380

We have investigated the morphology and sensitivity characteristics of nanostructured ZnO thin film prepared by sol-gel method from different molarities of zinc nitrate hexahydrate and hexamethylenetetramine (HMT) solutions. ZnO thin film coated glass substrates were used to growth the ZnO structures and have been annealed at different temperatures. The morphology of the samples was observed by scanning electron microscopy (SEM) and their sensitivity characteristics were measured by using the I-V measurement. The SEM studies shows that the nanostructured ZnO was denser at higher molarities and I-V measurement demonstrates that the nanostructured ZnO having higher sensitivity at higher molarities and higher annealing temperatures. © (2013) Trans Tech Publications, Switzerland.