| Summary: | This paper addresses the growth of nano-structured MgZnO thin films by sol-gel spin coating method which will be used as a template layer to grow carbon nanotubes. The nano-structured MgZnO films were deposited on platinized (100) silicon substrates. In this work, we focused on the effect of aging and Mg content on the film structure and resistivity. Sols with Mg content of 10, 30 and 50 at.% were subjected to aging times of between 3 to 240 hours. Results from scanning (SEM) and field emission scanning electron (FESEM) microscopes and surface profiler (SP) showed that the sol aging increased the thickness, grain size and surface roughness for aging up to 240 hours. The energy dispersive analysis by X-ray (EDAX) confirmed the element of Mg in the ZnO films. The electrical resistivity also increased with aging time as confirmed by four point probe method. The results suggest that appropriate aging of the sol is important for improving physical quality and electrical performance of MgZnO thin films derived from sol-gel technique. Copyright © 2012 American Scientific Publishers. All rights reserved.
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