| Summary: | This paper reports on the preparation of nanostructured of Mg xZn1-xO thin films by sol-gel spin coating method which will be used as a template layer to grow carbon nanotubes. The Mg xZn1-xO films were deposited on PtlSi (100) substrates. In this work, we focused on the effect of sol aging and Mg content on the film structure and resistivity. Sols with Mg content of x = 0.1, 0.3 and 0.5 were subjected to aging times of between 3 to 240 hours. X-Ray Diffractometer (XRD), energy dispersive analysis by X-ray (EDAX), scanning (SEM) and field emission scanning electron (FESEM) microscopes were used to characterize the structural properties. Results from SEM and FESEM show the thickness and grain size increased with aging up to 240 hours. XRD spectrum reveals the deposited thin films were poly crystalline wurtzite structure. The element of Mg in the ZnO films was confirmed by EDAX. The electrical resistivity also increased with aging time as confirmed by four point probe method. The results suggest that appropriate aging of the sol is important for improving structure quality and electrical performance of MgxZn1-xO thin films. ©2010 IEEE.
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