Structural properties of pulsed laser deposited zinc oxide thin films annealed at various temperatures

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Structural properties of pulsed laser deposited zinc oxide thin films annealed at various temperatures

Zinc oxide (ZnO) thin films were prepared by pulsed laser deposition (PLD) technique using XeCl excimer laser with a wavelength of 308 nm at room temperature on quartz and single crystal silicon (100) substrates. The oxygen gas pressure was set at 6 torr during the deposition. The deposited films we...

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Bibliographic Details
Published in:	Surface Engineering
Main Author:	Rusop M.; Uma K.; Soga T.; Jimbo T.
Format:	Article
Language:	English
Published:	2007
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-35348931006&doi=10.1179%2f174329406X122964&partnerID=40&md5=9f4ee022ad057d7556ed7b6e4673cce3

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